by Jeff Bendix

Case Western Reserve University has completed an agreement with FLX Micro Inc. of Solon, Ohio, to license advanced technology that will greatly improve the performance of microelectricalmechanical systems (MEMS) across a wide range of industries.

The technology licensed from the University relates to advanced methods of fabricating polycrystalline silicon carbide thin films for use in MEMS-based devices. Silicon carbide is well known for its outstanding mechanical, chemical and thermal properties and can bring substantial performance benefits to MEMS-based devices.

"This agreement with FLX Micro represents another example of our continued commitment to work with companies in Northeast Ohio so that the results of research conducted at Case will benefit Northeast Ohio," said Casey Porto, the University's associate vice president for technology transfer.

The principal investigators in developing the technology were Mehran Mehregany, professor and director of the department of electrical engineering and computer science in the Case School of Engineering, and Christian Zorman, principal researcher in the department. The University received an undisclosed equity interest in FLX Micro as part of the licensing agreement.

"We are pleased to add this new technology to our portfolio," said Jeff Melzak, president of FLX Micro. "Case's expertise in silicon carbide and MEMS fits nicely with our goal of offering a unique value proposition to our customers. We have enjoyed a positive working relationship with Case for a number of years and are delighted to formalize our relationship in this manner."

FLX Micro offers an advanced microsystems tool kit, including MEMS-based product development, state-of-the-art process technologies for silicon carbide and low cost MEMS prototyping through MUSiC(r), the world's first and only multi-user micromachining process that utilizes silicon carbide structural layers.

"FLX Micro is poised to assume a leadership role in the growing microsystems market," said Nick Frollini, director of technology transfer for engineering and physical sciences and managing director of the Case Technology Ventures fund. "We hope that they will become a significant force in our region."

Return to the online edition of the 9-18-03 Campus News.

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